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1

SPIE Proceedings [SPIE Rapid thermal and Integrated Processing - San Jose, United States (Tuesday 10 September 1991)] Rapid Thermal and Integrated Processing - Rapid thermal annealing of ion-implanted InP, InGaAs, and InSb

Rao, Mulpuri V., Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee

Year:

1992

Language:

english

File:

PDF, 1.06 MB

english, 1992

2

[American Institute of Aeronautics and Astronautics 50th AIAA/ASME/SAE/ASEE Joint Propulsion Conference - Cleveland, OH ()] 50th AIAA/ASME/SAE/ASEE Joint Propulsion Conference - A Review of Fiber Optic Technology for Turbine Engine Instrumentation Channel: Control, PHM, and Test Cell Applications

Pakmehr, Mehrdad, Behbahani, Alireza R., Moslehi, Behzad, Costa, Joey, Black, Richard J.

Year:

2014

Language:

english

File:

PDF, 1.51 MB

english, 2014

3

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Fundamental mechanisms and doping effects in silicon infrared absorption for temperature measurement by infrared transmission

Sturm, James C., Reaves, Casper M., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 346 KB

english, 1991

4

Fast-cycle-time single-wafer IC manufacturing

Mehrdad M. Moslehi, Lino Velo, Ajit Paranjpe, John Kuehne, Steve Huang, Richard Chapman, Chuck Schaper, Terence Breedijk, Habib Najm, David Yin, Yong Jin Lee, Dale Anderson, Cecil Davis

Journal:

Microelectronic Engineering

Year:

1994

Language:

english

File:

PDF, 3.38 MB

english, 1994

5

Primary cutaneous actinomycosis of the elbow with an exceptionally long incubation period

Ghaninejad Hayedeh, Hasibi Mehrdad, Moslehi Homayoun, Hashemi Pantea, Rashidi Armin

Journal:

International Journal of Dermatology

Year:

2008

Language:

english

File:

PDF, 888 KB

english, 2008

6

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Emissivity of silicon wafers during rapid thermal processing

Vandenabeele, Peter, Maex, Karen, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 928 KB

english, 1991

7

Ultralarge scale integrated metallization and interconnects

Whitman, Christine, Moslehi, Mehrdad M., Paranjpe, Ajit, Velo, Lino, Omstead, Tom

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

1999

Language:

english

File:

PDF, 1.13 MB

english, 1999

8

Rapid thermal nitridation of SiO2 for nitroxide thin dielectrics

Moslehi, Mehrdad M., Saraswat, Krishna C., Shatas, Steven C.

Journal:

Applied Physics Letters

Year:

1985

Language:

english

File:

PDF, 489 KB

english, 1985

9

SPIE Proceedings [SPIE SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring - San Diego, California, USA (Sunday 9 March 2014)] Health Monitoring of Structural and Biological Systems 2014 - Optical feather and foil for shape and dynamic load sensing of critical flight surfaces

Kundu, Tribikram, Black, Richard J., Costa, Joannes M., Faridian, Fereydoun, Moslehi, Behzad, Pakmehr, Mehrdad, Schlavin, Jon, Sotoudeh, Vahid, Zagrai, Andrei

Year:

2014

Language:

english

File:

PDF, 826 KB

english, 2014

10

Advanced epitaxial Si and Ge xSi1− x multiprocessing for semiconductor device technologies

Moslehi, Mehrdad M., Davis, Cecil J.

Journal:

Journal of Materials Research

Year:

1990

Language:

english

File:

PDF, 582 KB

english, 1990

11

Advanced Single-Wafer Sequential Multiprocessing Techniques for Semiconductor Device Fabrication

Moslehi, Mehrdad M., Davis, Cecil

Journal:

MRS Proceedings

Year:

1989

Language:

english

File:

PDF, 3.24 MB

english, 1989

12

Single Wafer Rapid Thermal Multiprocessing

Saraswat, Krishna C., Moslehi, Mehrdad M., Grossman, David D., Wood, Sam, Wright, Peter, Booth, Len

Journal:

MRS Proceedings

Year:

1989

Language:

english

File:

PDF, 1.14 MB

english, 1989

13

In-Situ Fabrication and Process Control Techniques in Rapid Thermal Processing

Moslehi, Mehrdad M., Kuehne, John, Yeakley, Richard, Velo, Lino, Najm, Habib, Dostalik, Bill, Yin, David, Davis, Cecil J.

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 951 KB

english, 1991

14

Demonstration of Multiprocessing by Silicon Epitaxy Following In-Situ Cleaning

Apte, Pushkar P., Venkatraman, Ramnath, Saraswat, Krishna C., Moslehi, Mehrdad M., Yeakley, Richard

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 2.58 MB

english, 1991

15

Rapid Thermal Processing Requirements for 0.35-µm IC Technologies and Beyond

Moslehi, Mehrdad M.

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 1.76 MB

english, 1994

16

The Insertion of Single-Wafer Integrated Thermal/CVD Technology in Front-End and Back-End of the Line Processing; Lessons Learned

Kermani, Ahmad, Omstead, Tom, Moslehi, Mehrdad, Spence, Paul, Winters, William

Journal:

MRS Proceedings

Year:

1994

Language:

english

File:

PDF, 3.34 MB

english, 1994

17

A Universal Thermal Module™ for Clusterable RTP and MOCVD Applications

Moslehi, Mehrdad M., Omstead, Tom, Lee, Yong Jin, Kermani, Ahmad, Velo, Lino, Schaper, Charles

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 4.85 MB

english, 1995

18

Temperature Estimation and Precision Control of RTP Systems by Multi-Zone Lamp Interference and Wafer Emissivity Compensation I: Model Identification

Belikov, Sergey, Kamali, Jalil, Lee, Yong Jin, Moslehi, Mehrdad

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 368 KB

english, 1997

19

Rapid Thermal/Plasma Processing for In-Situ Dielectric Engineering (Invited)

Moslehi, Mehrdad M.

Journal:

MRS Proceedings

Year:

1987

Language:

english

File:

PDF, 960 KB

english, 1987

20

Microwave Plasma LPCVD of Tungsten in a Cold-Wall Lamp-Heated Rapid Thermal Processor

Moslehi, Mehrdad M., Saraswat, Krishna C., Shatas, Steven C.

Journal:

MRS Proceedings

Year:

1987

Language:

english

File:

PDF, 599 KB

english, 1987

21

Temperature Uniformity Optimization Using Three-Zone Lamp and Dynamic Control in Rapid Thermal Multiprocessor

Apte, Pushkar P., Wood, Samuel, Booth, Len, Saraswat, Krishna C., Moslehi, Mehrdad M.

Journal:

MRS Proceedings

Year:

1991

Language:

english

File:

PDF, 1.25 MB

english, 1991

22

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Anomalous diffusion phenomena in two-step rapid thermal diffusion of phosphorus

Cho, Byung-Jin, Kim, Choong-Ki, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 480 KB

english, 1991

23

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Noninvasive sensors for in-situ process monitoring and control in advanced microelectronics manufacturing

Moslehi, Mehrdad M., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 1.11 MB

english, 1991

24

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Rapid thermal processing in the manufacturing technology of contacts to InP-based photonic devices

Katz, Avishay, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 1.19 MB

english, 1991

25

SPIE Proceedings [SPIE Rapid thermal and Integrated Processing - San Jose, United States (Tuesday 10 September 1991)] Rapid Thermal and Integrated Processing - Application of modern quality improvement techniques to rapid thermal processing

Davis, Joseph C., Gyurcsik, Ronald S., Lu, Jeng-Chang, Perkins, Richard H., Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee

Year:

1992

Language:

english

File:

PDF, 894 KB

english, 1992

26

SPIE Proceedings [SPIE Rapid thermal and Integrated Processing - San Jose, United States (Tuesday 10 September 1991)] Rapid Thermal and Integrated Processing - Uniformity characterization of rapid thermal processor thin films

Yarling, Charles B., Cook, Dawn-Marie, Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee

Year:

1992

Language:

english

File:

PDF, 249 KB

english, 1992

27

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Low-resistivity contacts to silicon using selective RTCVD of germanium

Grider, D. T., Ozturk, Mehmet C., Wortman, Jim J., Littlejohn, Michael A., Zhong, Y., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 416 KB

english, 1991

28

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Round-robin comparison of temperature nonuniformity during RTP due to patterned layers

Vandenabeele, Peter, Maex, Karen, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 785 KB

english, 1991

29

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Low-temperature in-situ dry cleaning process for epitaxial layer multiprocessing

Moslehi, Mehrdad M., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 1005 KB

english, 1991

30

SPIE Proceedings [SPIE Rapid thermal and Integrated Processing - San Jose, United States (Tuesday 10 September 1991)] Rapid Thermal and Integrated Processing - Chemically modified ultrathin oxides fabricated by rapid thermal processing

Joshi, Atul B., Lo, G. Q., Ahn, J., Ting, Windsor, Kwong, Dim-Lee, Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee

Year:

1992

Language:

english

File:

PDF, 1.27 MB

english, 1992

31

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - RTP-induced defects in silicon studied by positron annihilation technique

Kulkarni, N. M., Kulkarni, Revati N., Shaligram, Arvind D., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 514 KB

english, 1991

32

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Systems-oriented survey of noncontact temperature measurement techniques for rapid thermal processing

Peyton, David, Kinoshita, Hiroyuki, Lo, G. Q., Kwong, Dim-Lee, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 978 KB

english, 1991

33

SPIE Proceedings [SPIE 1989 Microelectronic Intergrated Processing Conferences - Santa Clara (Tuesday 10 October 1989)] Rapid Isothermal Processing - Rapid Thermal Multiprocessing For Micro Factories

Saraswat, Krishna C., Booth, Len, Grossman, David D., Khuri-Yakub, B. T., Lee, Yong Jin, Moslehi, Mehrdad M., Wood, Samuel, Singh, Rajendra

Year:

1990

Language:

english

File:

PDF, 683 KB

english, 1990

34

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Si-based epitaxial growth by rapid thermal processing chemical vapor deposition

Jung, Kissoo H., Hsieh, T. Y., Kwong, Dim-Lee, Spratt, D. B., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 1.81 MB

english, 1991

35

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Precompetitive cooperative research: the culture of the '90s

Holton, William C., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 583 KB

english, 1991

36

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Performance and reliability of ultrathin reoxidized nitrided oxides fabricated by rapid thermal processing

Joshi, Atul B., Lo, G. Q., Shih, Dennis K., Kwong, Dim-Lee, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 1.89 MB

english, 1991

37

SPIE Proceedings [SPIE Rapid thermal and Integrated Processing - San Jose, United States (Tuesday 10 September 1991)] Rapid Thermal and Integrated Processing - Influence of pyrometer signal absorption due to process gas on temperature control in rapid thermal processing

Chang, Julius C., Nguyen, Tue, Nakos, James S., Korejwa, Josef W., Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee

Year:

1992

Language:

english

File:

PDF, 210 KB

english, 1992

38

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - RTP temperature uniformity mapping

Keenan, W. A., Johnson, Sr., Walter H., Hodul, David T., Mordo, David, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 608 KB

english, 1991

39

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - High-temperature degradation-free rapid thermal annealing of GaAs and InP

Pearton, Stephen J., Katz, Avishay, Geva, Michael, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 1.30 MB

english, 1991

40

SPIE Proceedings [SPIE Rapid thermal and Integrated Processing - San Jose, United States (Tuesday 10 September 1991)] Rapid Thermal and Integrated Processing - Control of polysilicon emitter interface using RTCVD

Kermani, Ahmad, Jalali, Bahram, Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee

Year:

1992

Language:

english

File:

PDF, 675 KB

english, 1992

41

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Selective deposition of polycrystalline SixGe1-x by rapid thermal processing

Ozturk, Mehmet C., Zhong, Y., Grider, D. T., Sanganeria, M., Wortman, Jim J., Littlejohn, Michael A., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 783 KB

english, 1991

42

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Uniformity characterization of rapid thermal processor thin films

Yarling, Charles B., Cook, Dawn-Marie, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 502 KB

english, 1991

43

SPIE Proceedings [SPIE Rapid thermal and Integrated Processing - San Jose, United States (Tuesday 10 September 1991)] Rapid Thermal and Integrated Processing - Oxidation of hydrogen silsesquioxane, (HSiO3/2)n9, by rapid thermal processing

Gentle, Theresa E., Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee

Year:

1992

Language:

english

File:

PDF, 1.20 MB

english, 1992

44

SPIE Proceedings [SPIE Rapid thermal and Integrated Processing - San Jose, United States (Tuesday 10 September 1991)] Rapid Thermal and Integrated Processing - Optical properties of Si1-xGex quantum wells and superlattices grown by rapid thermal chemical vapor deposition

Sturm, James C., Xiao, Xiaodong, Manoharan, H., Schwartz, P. V., Moslehi, Mehrdad M., Singh, Rajendra, Kwong, Dim-Lee

Year:

1992

Language:

english

File:

PDF, 574 KB

english, 1992

45

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Single-wafer integrated processing as a manufacturing tool using rapid thermal chemical vapor deposition technology

Kermani, Ahmad, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 490 KB

english, 1991

46

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Multichamber rapid thermal processing

Rosser, Paul J., Moynagh, P., Affolter, Kevin B., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 827 KB

english, 1991

47

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - In-situ interferometric measurements in a rapid thermal processor

Dilhac, Jean-Marie R., Ganibal, Christian, Nolhier, N., Amat, L., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 274 KB

english, 1991

48

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Rapid thermal processing induced defects and gettering effects in silicon

Hartiti, Bouchaib B., Muller, Jean-Claude, Siffert, Paul, Vu, Thuong-Quat, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 307 KB

english, 1991

49

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Investigation of rapid thermal process-induced defects in ion-implanted Czochralski silicon

Yarling, Charles B., Hahn, Sookap, Hodul, David T., Suga, Hisaaki, Smith, Walter L., Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 440 KB

english, 1991

50

SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Adaptive process control for a rapid thermal processor

Dilhac, Jean-Marie R., Ganibal, Christian, Bordeneuve, J., Dahhou, B., Amat, L., Picard, Antoni, Singh, Rajendra, Moslehi, Mehrdad M.

Year:

1991

Language:

english

File:

PDF, 417 KB

english, 1991